An analysis of frequency temperature characteristics vs. film thickness of electrodes for AT-cut resonators

This paper describes both theoretical analysis and experimental results regarding frequency temperature-electrode film thickness characteristics for AT-cut resonators. The experiments were conducted by the oscillating method over a wide temperature range from -50 to 100°C. The quadric formula between the turn-over temperature and the electrode film thickness was proposed theoretically and the coefficients of the quadric were decided by the least squares method using the experimental results. This paper also discusses a new frequency equation, taking account of the film thicknesses for AT-cut resonators