Title :
2003 International Semiconductor Device Research Symposium (IEEE Cat. No.03EX741)
Abstract :
The following topics are dealt with: optoelectronics and LED lighting; novel dielectrics; photonics and optoelectronics; wide band gap semiconductors; device modeling; high frequency devices; nanoelectronics; novel device concepts; advanced SOI technology; advanced processing and characterization; MEMS and bio sensors; RF effects in IC´s.
Keywords :
CMOS integrated circuits; MOS capacitors; MOSFET; biosensors; diffusion; electroluminescence; etching; high electron mobility transistors; light emitting diodes; micromechanical devices; nanotube devices; photonic band gap; photonic crystals; radiofrequency integrated circuits; rapid thermal annealing; resonant tunnelling diodes; semiconductor device models; semiconductor device reliability; semiconductor epitaxial layers; semiconductor quantum dots; silicon-on-insulator; wide band gap semiconductors; IC; LED lighting; MEMS; RF effects; SOI technology; bio sensors; device modeling; nanoelectronics; novel dielectrics; optoelectronics; photonics; semiconductor device research; wide band gap semiconductors; Biomedical transducers; CMOS integrated circuits; Diffusion processes; Electroluminescence; Etching; Light-emitting diodes; MODFETs; MOS capacitors; MOSFETs; Microelectromechanical devices; Quantum dots; Rapid thermal annealing; Resonant tunneling diodes; Semiconductor device modeling; Semiconductor device reliability; Semiconductor epitaxial layers; Silicon on insulator technology;
Conference_Titel :
Semiconductor Device Research Symposium, 2003 International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-8139-4
DOI :
10.1109/ISDRS.2003.1271947
