DocumentCode
2615188
Title
Corrosion of Aluminum Metallization Through Flawed Polymer Passivation Layers; In-Situ Microscopy
Author
Will, Fritz G. ; Janora, Kevin H. ; McMullen, James G. ; Yerman, Alexander J.
Author_Institution
General Electric Corporate Research and Development, PO Box 8, Schenectady, New York 12301
fYear
1987
fDate
31868
Firstpage
34
Lastpage
41
Abstract
Aluminum corrosion in a polymer-coated circuit model was studied using in-situ microscopy coupled with time-lapse video recording. Pinholes in the polymer coating and exposure to water with bias voltage of 40V applied between adjacent aluminum tracks resulted in fast anode corrosion, accompanied by gas evolution. A mathematical model is developed that is in good agreement with the observed current-time relationship. The rate of corrosion is controlled by the resistance of a 6000A thick water film occupying the space of the corroded Al film between wafer and polymer coating. A tentative corrosion mechanism is proposed.
Keywords
Aluminum; Anodes; Corrosion; Coupling circuits; Metallization; Microscopy; Passivation; Polymer films; Video recording; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1987. 25th Annual
Conference_Location
San Diego, CA, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1987.362152
Filename
4208686
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