Title :
A Novel SAW Humidity Sensor Based on Electrosprayed Polymerized Electrolyte Film
Author :
Sheng, Lei ; Yuquan, Chen ; Yang, Li
Author_Institution :
Zhejiang Univ., Hangzhou, China
Abstract :
A novel humidity sensor with high sensitivity, short response time and excellent reproducibility was developed. The sensor utilized single-port surface acoustic wave resonator (SAWR) with high resonance frequency as basic component. The silicone-containing polyelectrolyte was electro sprayed onto SAWR surface to form humidity-sensitive film with micro/nano-scale. The experimental results showed that the humidity sensor made with the novel method has a wide detection range at least from 10% to 97% RH, a high sensitivity and up-to 1% RH measurement accuracy and a short response time less than 3s.
Keywords :
humidity sensors; polymer electrolytes; polymer films; surface acoustic wave resonators; SAW; electrosprayed polymerized electrolyte film; humidity sensor; microscale; nanoscale; silicone containing polyelectrolyte; surface acoustic wave resonator; Films; Humidity; Sensitivity; Surface acoustic waves; Temperature sensors; Time factors; Electrospray; Humidity sensor; SAWR; polyelectrolyte;
Conference_Titel :
Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on
Conference_Location :
Shangshai
Print_ISBN :
978-1-4244-9010-3
DOI :
10.1109/ICMTMA.2011.59
