A Novel SAW Humidity Sensor Based on Electrosprayed Polymerized Electrolyte Film

Author

Sheng, Lei ; Yuquan, Chen ; Yang, Li

Author_Institution

Zhejiang Univ., Hangzhou, China

Volume

1

fYear

2011

fDate

6-7 Jan. 2011

Firstpage

214

Lastpage

217

Abstract

A novel humidity sensor with high sensitivity, short response time and excellent reproducibility was developed. The sensor utilized single-port surface acoustic wave resonator (SAWR) with high resonance frequency as basic component. The silicone-containing polyelectrolyte was electro sprayed onto SAWR surface to form humidity-sensitive film with micro/nano-scale. The experimental results showed that the humidity sensor made with the novel method has a wide detection range at least from 10% to 97% RH, a high sensitivity and up-to 1% RH measurement accuracy and a short response time less than 3s.

Keywords

humidity sensors; polymer electrolytes; polymer films; surface acoustic wave resonators; SAW; electrosprayed polymerized electrolyte film; humidity sensor; microscale; nanoscale; silicone containing polyelectrolyte; surface acoustic wave resonator; Films; Humidity; Sensitivity; Surface acoustic waves; Temperature sensors; Time factors; Electrospray; Humidity sensor; SAWR; polyelectrolyte;

fLanguage

English

Publisher

ieee

Conference_Titel

Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on

Conference_Location

Shangshai

Print_ISBN

978-1-4244-9010-3

Type

conf

DOI

10.1109/ICMTMA.2011.59

Filename

5720760