Title : 
Novel technology of Er-doped glassy films fabrication for applications in optoelectronics
         
        
            Author : 
Kholodkov, A.V. ; Golant, K.M.
         
        
            Author_Institution : 
Gen. Phys. Inst., Acad. of Sci., Moscow, Russia
         
        
        
        
        
        
            Abstract : 
Er3+ ions luminescence in silicate samples with Ge, Al, K, N, F additives is investigated. No fall in quantum yield of C-band luminescence in aluminium silicate and potassium silicate hosts is revealed up to ∼1020cm-3 Er3+ concentration.
         
        
            Keywords : 
additives; aluminosilicate glasses; erbium; fluoride glasses; germanate glasses; luminescence; nitrogen; plasma CVD; potassium; thin films; C-band luminescence; Er-doped glassy films; SiO2-Al:Er; SiO2-F:Er; SiO2-Ge:Er; SiO2-K:Er; SiO2-N:Er; additives; aluminium silicate; ions luminescence; optoelectronics applications; potassium silicate; Atomic layer deposition; Chemical technology; Erbium; Glass; Luminescence; Optical device fabrication; Optical surface waves; Plasma chemistry; Plasma temperature; Silicon compounds;
         
        
        
        
            Conference_Titel : 
Semiconductor Device Research Symposium, 2003 International
         
        
            Print_ISBN : 
0-7803-8139-4
         
        
        
            DOI : 
10.1109/ISDRS.2003.1272010