• DocumentCode
    2615723
  • Title

    Analysis of a Silver Substrate, Gold-Silicon Preform, Die Attach System

  • Author

    Nolder, Richard L. ; Malone, David N.

  • Author_Institution
    Hughes Aircraft Company, Ground Systems Group, P.O. Box 68000, Anaheim, California 92817-0800. (714) 970-4158
  • fYear
    1987
  • fDate
    31868
  • Firstpage
    229
  • Lastpage
    237
  • Abstract
    Using silver substrates, a gold-silicon preform die attach system requires tighter process controls than the use of the more conventional gold substrates. This paper explains the mechanism for die attach failures and presents methods of avoidance. The primary observation is that silver raises the minimum melt temperature when it alloys with the preform. Cross sections of four types of samples were prepared at temperatures ranging from 400 - 480°C. These were analyzed by means of metallographic, scanning electron microscopy and energy dispersive xray techniques. A ternary phase system is proposed which explains the observed metallographic structures.
  • Keywords
    Bonding; Gold; Metallization; Microassembly; Preforms; Process control; Scanning electron microscopy; Silicon; Silver; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1987. 25th Annual
  • Conference_Location
    San Diego, CA, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1987.362184
  • Filename
    4208718