DocumentCode
2615723
Title
Analysis of a Silver Substrate, Gold-Silicon Preform, Die Attach System
Author
Nolder, Richard L. ; Malone, David N.
Author_Institution
Hughes Aircraft Company, Ground Systems Group, P.O. Box 68000, Anaheim, California 92817-0800. (714) 970-4158
fYear
1987
fDate
31868
Firstpage
229
Lastpage
237
Abstract
Using silver substrates, a gold-silicon preform die attach system requires tighter process controls than the use of the more conventional gold substrates. This paper explains the mechanism for die attach failures and presents methods of avoidance. The primary observation is that silver raises the minimum melt temperature when it alloys with the preform. Cross sections of four types of samples were prepared at temperatures ranging from 400 - 480°C. These were analyzed by means of metallographic, scanning electron microscopy and energy dispersive xray techniques. A ternary phase system is proposed which explains the observed metallographic structures.
Keywords
Bonding; Gold; Metallization; Microassembly; Preforms; Process control; Scanning electron microscopy; Silicon; Silver; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1987. 25th Annual
Conference_Location
San Diego, CA, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1987.362184
Filename
4208718
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