DocumentCode :
2615800
Title :
Automatic generation of simulation models for semiconductor manufacturing
Author :
Mueller, Ralph ; Alexopoulos, Christos ; McGinnis, Leon F.
Author_Institution :
N.W. Georgia Inst. of Technol., Atlanta
fYear :
2007
fDate :
9-12 Dec. 2007
Firstpage :
648
Lastpage :
657
Abstract :
This article gives an overview of a framework for automatically generating large-scale simulation models from a domain specific problem definition data schema, here semiconductor manufacturing. This simulation model uses an object-oriented Petri net data structure. The Petri net based simulation uses the same enabling rules as classical Petri nets, but has extensions of time and priorities. This approach minimizes the effort of model verification. Each object identified in the problem data specification is mapped to corresponding Petri net fragments. The Petri net simulation model is synthesized from verifiable subnets. This allows ensuring the liveness of the final Petri net simulation model. The applicability of this approach is demonstrated by generating a simulation model based on the Sematech data set.
Keywords :
Petri nets; data structures; digital simulation; formal specification; formal verification; object-oriented methods; semiconductor device manufacture; Petri net simulation model; automatic simulation model generation; data specification; model verification; object-oriented Petri net data structure; semiconductor manufacturing; Computational modeling; Costs; Data structures; Hardware; Manufacturing automation; Manufacturing systems; Object oriented modeling; Petri nets; Semiconductor device manufacture; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference, 2007 Winter
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1306-5
Electronic_ISBN :
978-1-4244-1306-5
Type :
conf
DOI :
10.1109/WSC.2007.4419658
Filename :
4419658
Link To Document :
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