A manufacturable complementary GaAs process

Author

Abrokwah, J.K. ; Huang, J.H. ; Ooms, W. ; Shurboff, C. ; Hallmark, J.A. ; Lucero, R. ; Gilbert, J. ; Bernhards, B. ; Hansell, G.

Author_Institution

Motorola Inc., Tempe, AZ, USA

fYear

1993

fDate

10-13 Oct. 1993

Firstpage

127

Lastpage

130

Abstract

A self-aligned complementary GaAs heterostructure FET process has been established for low power, high-speed digital circuits. The devices are fabricated on four-inch MBE epitaxial wafers consisting of AlGaAs/InGaAs epilayers grown on LEC GaAs substrates. The process uses twelve lithographic steps including two levels of interconnect metal. Typical transconductances of 250 mS/mm and 60 mS/mm are achieved on 1/spl times/10 /spl mu/m N-channel and P-channel devices, respectively. Twenty-three stage unloaded complementary ring oscillators consisting of 1/spl times/10 /spl mu/m N- and P-FETs show propagation delay of 190 ps and speed-power product of 7.5 fJ or 0.35 /spl mu/W/MHz.<>

Keywords

III-V semiconductors; field effect digital integrated circuits; gallium arsenide; integrated circuit interconnections; integrated circuit yield; very high speed integrated circuits; 190 ps; 250 mS/mm; 60 mS/mm; Al interconnect; AlGaAs-InGaAs epilayers; CS-7 facility; GaAs; GaAs substrates; III-V semiconductor; MBE epitaxial wafers; complementary HIGFET; heterostructure FET process; high yield; high-speed digital circuits; low power; manufacturable complementary process; multilevel VLSI interconnect; propagation delay; self-aligned; unloaded complementary ring oscillators; Digital circuits; FETs; Gallium arsenide; Indium gallium arsenide; Integrated circuit interconnections; Manufacturing processes; Molecular beam epitaxial growth; Propagation delay; Ring oscillators; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 1993. Technical Digest 1993., 15th Annual

Conference_Location

San Jose, CA, USA

Print_ISBN

0-7803-1393-3

Type

conf

DOI

10.1109/GAAS.1993.394486

Filename

394486