DocumentCode :
2616841
Title :
The effect of irradiation temperature on post-irradiation strain levels in GexSi1-x/Si strained layer heterostructures
Author :
Glasko, J.M. ; Zou, J. ; Cockayne, D.J.H. ; Gerald, J. Fitz ; Elliman, R.G.
Author_Institution :
Dept. of Electron. Mater. Eng., Australian Nat. Univ., Canberra, ACT, Australia
fYear :
1996
fDate :
8-11 Dec 1996
Firstpage :
142
Lastpage :
145
Abstract :
Double crystal X-ray diffraction (DCXRD), transmission electron microscopy (TEM), and Rutherford backscattering spectroscopy and channelling (RBS-C) were used to study the effect of irradiation temperature and ion-energy on the perpendicular strain (ε) in GexSi1-x/Si strained layer heterostructures. Room temperature irradiation was shown to increase ε. This effect was adequately modelled by assuming that irradiation caused additional strain due to excess interstitial distribution. The effects of irradiating at 253°C were more complex, resulting in: (a) an increase in ε when the radiation damage profile was confined to the alloy layer; or (b) a decrease in ε when the damage profile extended through the alloy/substrate interface. Strain relaxation at elevated temperature is believed to be effected by loop-like defects which nucleate at or near the alloy/substrate interface during high energy irradiation
Keywords :
Ge-Si alloys; Rutherford backscattering; X-ray diffraction; channelling; deformation; elemental semiconductors; interstitials; ion beam effects; semiconductor heterojunctions; semiconductor materials; silicon; transmission electron microscopy; GeSi-Si; Rutherford backscattering spectroscopy; alloy/substrate interface; channelling; damage profile; double crystal X-ray diffraction; interstitial distribution; ion irradiation temperature; loop-like defect nucleation; perpendicular strain; strain relaxation; strained layer heterostructure; transmission electron microscopy; Australia; Backscatter; Capacitive sensors; Electron microscopy; Lattices; Spectroscopy; Substrates; Temperature; Transmission electron microscopy; X-ray diffraction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optoelectronic and Microelectronic Materials And Devices Proceedings, 1996 Conference on
Conference_Location :
Canberra, ACT
Print_ISBN :
0-7803-3374-8
Type :
conf
DOI :
10.1109/COMMAD.1996.610092
Filename :
610092
Link To Document :
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