A MEMS Ultra-Stable Short Duration Current Pulse Generator

Author

Tam, Andrew ; Chowdhury, Sazzadur

Author_Institution

Dept. of Electr. & Comput. Eng., Windsor Univ., Ont.

fYear

2007

fDate

9-11 March 2007

Firstpage

369

Lastpage

374

Abstract

The design of a MEMS ultra-stable short duration current pulse generator has been presented. The device exploits single bubble sonoluminescence (SBSL) to convert acoustical energy to electrical energy through an intermediate optical stage. In the developed scheme, highly stable laser like short duration light pulses are emitted as high amplitude ultrasound waves strike a thermally generated microbubble stabilized in a small volume of water confined in a microfabricated cylindrical chamber. These light pulses are detected by an integrated photodetector to generate ultra-stable 100 picoseconds duration current pulses per acoustical cycle. The cylindrical geometry device is 650 mum in diameter and 300 mum in height and is designed to have a sensitivity of 5.56 mA/atm/cycle. The device could be used for tissue and nerve repair or micro-surgery.

Keywords

micromechanical devices; photodetectors; pulse generators; sonoluminescence; ultrasonic waves; 100 ps; 300 micron; 650 micron; MEMS; acoustical energy; cylindrical chamber; cylindrical geometry device; electrical energy; high amplitude ultrasound waves; integrated photodetector; pulse generator; short duration light pulses; single bubble sonoluminescence; thermally generated microbubble; ultra-stable short duration current; Acoustic pulses; Acoustic signal detection; Laser stability; Micromechanical devices; Optical devices; Optical pulse generation; Optical sensors; Pulse generation; Stimulated emission; Ultrasonic imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI, 2007. ISVLSI '07. IEEE Computer Society Annual Symposium on

Conference_Location

Porto Alegre

Print_ISBN

0-7695-2896-1

Type

conf

DOI

10.1109/ISVLSI.2007.8

Filename

4208942