DocumentCode :
2618446
Title :
Perspective of Semiconductor Manufacturing from IC Design
Author :
Lu, H Shelton
Author_Institution :
VIA Technologies
fYear :
2000
fDate :
2000
Firstpage :
1
Lastpage :
19
Keywords :
Semiconductor device manufacture;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2000
Print_ISBN :
0-7803-6374-4
Type :
conf
DOI :
10.1109/SMTW.2000.883085
Filename :
883085
Link To Document :
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