DocumentCode
2618446
Title
Perspective of Semiconductor Manufacturing from IC Design
Author
Lu, H Shelton
Author_Institution
VIA Technologies
fYear
2000
fDate
2000
Firstpage
1
Lastpage
19
Keywords
Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Technology Workshop, 2000
Print_ISBN
0-7803-6374-4
Type
conf
DOI
10.1109/SMTW.2000.883085
Filename
883085
Link To Document