• DocumentCode
    2618446
  • Title

    Perspective of Semiconductor Manufacturing from IC Design

  • Author

    Lu, H Shelton

  • Author_Institution
    VIA Technologies
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    1
  • Lastpage
    19
  • Keywords
    Semiconductor device manufacture;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing Technology Workshop, 2000
  • Print_ISBN
    0-7803-6374-4
  • Type

    conf

  • DOI
    10.1109/SMTW.2000.883085
  • Filename
    883085