DocumentCode :
2618458
Title :
Technical and Business Issues of 300mm Inplementation
Author :
Goodall, Randy
Author_Institution :
Manufacturing Methods and Productivity Thrust
fYear :
2000
fDate :
2000
Firstpage :
20
Lastpage :
72
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2000
Print_ISBN :
0-7803-6374-4
Type :
conf
DOI :
10.1109/SMTW.2000.883086
Filename :
883086
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2618458
