DocumentCode

2618458

Title

Technical and Business Issues of 300mm Inplementation

Author

Goodall, Randy

Author_Institution

Manufacturing Methods and Productivity Thrust

fYear

2000

fDate

2000

Firstpage

20

Lastpage

72

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Technology Workshop, 2000

Print_ISBN

0-7803-6374-4

Type

conf

DOI

10.1109/SMTW.2000.883086

Filename

883086