Title :
Design of MEMS Low Range Accelerometer
Author :
Tao, Guo ; Ting, Xiang ; Qingguo, Fei
Author_Institution :
Nat. Key Lab. for Electron. Meas. Technol., North Univ. of China, TaiYuan, China
Abstract :
A new MEMS accelerometer with low range is designed based on traditional bilateral four Beam micro accelerometer, measuring range is ±10g. Using the ANSYS finite element software to model the accelerometer structure firstly, and then to analysis stress "modal and impact ability". The theoretical sensitivity of the accelerometer reaches 1.029mV/g when the supply voltage is 5V, compared to the traditional structure, it greatly improves low range accelerometer\´s sensitivity.
Keywords :
accelerometers; finite element analysis; microsensors; ANSYS finite element software; MEMS low range accelerometer; accelerometer sensitivity; accelerometer structure; bilateral four beam microaccelerometer; Acceleration; Accelerometers; Finite element methods; Particle beams; Sensitivity; Silicon; Stress; Finite element analysis; Low range; MEMS accelerometer; sensitivity;
Conference_Titel :
Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on
Conference_Location :
Shangshai
Print_ISBN :
978-1-4244-9010-3
DOI :
10.1109/ICMTMA.2011.246
