Title :
A micromachined preconcentrator for enhanced trace detection of illicit materials
Author :
McGill, R. Andrew ; Martin, Michael ; Ross, Stuart ; Stepnowski, Jennifer ; Stepnowski, Stanley ; Houser, Eric ; Mott, David ; Walsh, Kevin ; Crain, Mark ; Nguyen, Viet ; Wu, H.-D. ; Voiculescu, Ioana
Author_Institution :
Naval Res. Lab., Washington, DC, USA
Abstract :
In this paper, we design and fabricate a robust micromachined cascade avalanche sorbent plate array (CASPAR) preconcentrators. The CASPAR is designed to provide a low pressure drop compatible with high flow collections, high vapour collection efficiency for target analytes, a low thermal mass for a shot thermal time constant, and low power operation. The preconcentrator is integrated to existing chemical agent and trace explosive detectors, and successfully tested. Comparison of conventional preconcentrator and CASPAR characteristics are discussed.
Keywords :
chemical sensors; microsensors; polymers; cascade avalanche sorbent plate array; enhanced trace detection; flow collections; illicit materials; micromachined preconcentrator; pressure drop; target analytes; thermal mass; thermal time constant; trace explosive detectors; vapour collection efficiency; Chemicals; Detectors; Explosives; Laboratories; Polymer films; Robustness; Silicon; Sprites (computer); Testing; Transportation;
Conference_Titel :
Semiconductor Device Research Symposium, 2003 International
Print_ISBN :
0-7803-8139-4
DOI :
10.1109/ISDRS.2003.1272217
