Title :
Postprocessing technologies, interface circuits and packaging strategies for CMOS compatible gas flow sensors
Author :
Bruschia, P. ; Piotto, M. ; Bacci, Nicholas
Author_Institution :
Dipt. di Ingegneria dell´´Informazione, Pisa
Abstract :
Thermal gas flow meters based on two different architectures have been fabricated using two commercial CMOS processes. Low cost postprocessing methods, adapted to the features of modern industrial processes, are discussed. Three inexpensive packaging strategies are proposed and their effects on the device response have been compared. The sensitivity dependence on gas type has been investigated for the two proposed architectures.
Keywords :
CMOS integrated circuits; flow sensors; gas sensors; semiconductor device packaging; CMOS compatible gas flow sensors; interface circuits; low cost postprocessing methods; packaging strategies; thermal gas flow meters; CMOS technology; Circuits; Costs; Dielectrics and electrical insulation; Fluid flow; Gas detectors; Packaging; Probes; Temperature sensors; Thermal sensors;
Conference_Titel :
Advances in Sensors and Interface, 2007. IWASI 2007. 2nd International Workshop on
Conference_Location :
Bari
Print_ISBN :
978-1-4244-1245-7
Electronic_ISBN :
978-1-4244-1245-7
DOI :
10.1109/IWASI.2007.4420018
