Title :
Giant Magnetoimpedance Sensor with Tortuous Shape Fabricated by MEMS Technology
Author_Institution :
Sch. of Mech. & Electr. Eng., NanChang Inst. of Technol., Nanchang, China
Abstract :
Field-annealed Co-based amorphous ribbon (Metglas® 2705M) with a tortuous structure is fabricated by MEMS technology and the giant magneto impedance (GMI) effects are studied at various magnetic field and frequency. The magnetization curve of the ribbon shows small coercivity and anisotropy field. The maximum longitudinal GMI ratio of the ribbon is 193.7% and the magnetic field sensitivity is 17.4%/Oe. The GMI peak value of the tortuous ribbon is much larger than the single strip ribbon due to the larger external inductance result from the tortuous shape. Tortuous structure and line width both have strong influence on GMI effect. This tortuous shape ribbon can be considered as a good candidate to fabricate the GMI-based sensor with excellent performance.
Keywords :
amorphous magnetic materials; cobalt alloys; coercive force; giant magnetoresistance; magnetic anisotropy; magnetic annealing; magnetic sensors; magnetoresistive devices; metallic glasses; microsensors; CoJkJk; MEMS; Metglas 2705M; anisotropy field; coercivity; field-annealed amorphous ribbon; giant magnetoimpedance sensor; line width; magnetic field sensitivity; magnetization curve; tortuous structure; Amorphous magnetic materials; Inductance; Magnetic anisotropy; Magnetic fields; Periodic structures; Shape; Strips; Co-based ribbon; Giant magnetoimpedance; MEMS; Sensor; Tortuous shape;
Conference_Titel :
Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on
Conference_Location :
Shangshai
Print_ISBN :
978-1-4244-9010-3
DOI :
10.1109/ICMTMA.2011.360
