Title :
A predictive model for Si-based circular spiral inductors
Author :
Rejaei, B. ; Tauritz, J.L. ; Snoeij, P.
Author_Institution :
Fac. of Inf. Technol. & Syst., Delft Univ. of Technol., Netherlands
Abstract :
The electromagnetic behaviour of Si-based circular spiral inductors is analysed by using a mapping onto a system of concentric rings. The corresponding field equations are solved exactly within the quasi-one-dimensional approximation. The solution is then presented as an equivalent lumped-element model where substrate RF losses are accounted for by nonlocal mutual resistances. The results are in good agreement with experimental data.
Keywords :
MMIC; Q-factor; UHF integrated circuits; elemental semiconductors; equivalent circuits; inductors; integrated circuit modelling; integrated circuit reliability; silicon; transceivers; Si; circular spiral inductors; concentric rings; electromagnetic behaviour; equivalent lumped-element model; field equations; mapping; nonlocal mutual resistances; predictive model; quasi-one-dimensional approximation; substrate RF losses; Electromagnetic analysis; Electromagnetic induction; Equations; Inductors; Information technology; Microwave technology; Predictive models; Radio frequency; Spirals; Transmission line matrix methods;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 1998. Digest of Papers. 1998 Topical Meeting on
Conference_Location :
Ann Arbor, MI, USA
Print_ISBN :
0-7803-5288-2
DOI :
10.1109/SMIC.1998.750210
