DocumentCode
2621826
Title
High-Q inductors on silicon using a quasi thin film microstrip technique
Author
Erben, U. ; Abele, P. ; Behammer, D. ; Ergraber, H. ; Schmacher, H.
Author_Institution
Dept. of Electron. Devices & Circuits, Ulm Univ., Germany
fYear
1998
fDate
18-18 Sept. 1998
Firstpage
155
Lastpage
159
Abstract
In high frequency circuit design inductors play an important role, being applied in matching networks, in filter structures and as load impedances. Because of this, high quality factors and reasonable high inductance values at lower frequencies are highly desired. The introduction of thick dielectric layers with small permittivities enhances both figures of merit.
Keywords
MMIC; Q-factor; UHF integrated circuits; inductors; microstrip components; silicon; thin film devices; 500 MHz to 15 GHz; HF circuits; Si; Si substrate; filter structures; high frequency circuit design; high quality factors; high-Q inductors; load impedances; matching networks; permittivities; quasi thin film microstrip technique; thick dielectric layers; Circuit synthesis; Dielectric thin films; Frequency; Impedance; Matched filters; Microstrip; Semiconductor thin films; Silicon; Thin film circuits; Thin film inductors;
fLanguage
English
Publisher
ieee
Conference_Titel
Silicon Monolithic Integrated Circuits in RF Systems, 1998. Digest of Papers. 1998 Topical Meeting on
Conference_Location
Ann Arbor, MI, USA
Print_ISBN
0-7803-5288-2
Type
conf
DOI
10.1109/SMIC.1998.750211
Filename
750211
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