Model based design optimization of micromechanical systems, based on the Cosserat theory

In this paper we present the model based design optimization on a micromechanical system which is described by a VHDL-AMS behaviour model, based on the Cosserat theory. The application is a gyroscope test structure developed by STMicroelectronics. The schematic of the microactuator is built up from component models developed in Lancaster within previous work. The equations of motion of the beam model were derived using Cosserat theory. The rigid body model was adjusted to capture the behaviour of the central disk with comb-drives of the microactuator target structure. Within the model based design optimization system MODOS developed at the University of Bremen a model optimization and a model based design optimization were performed. In this report we represent the theoretical background of the modeling and optimization process and publish the received results.