Title :
12.9 A 1.55×0.85mm2 3ppm 1.0μA 32.768kHz MEMS-based oscillator
Author :
Asl, Samira Zali ; Mukherjee, Sayan ; Chen, Weijie ; Kimo Joo ; Palwai, Rajkumar ; Arumugam, Niveditha ; Galle, Preston ; Phadke, Meghan ; Grosjean, Charles ; Salvia, Jim ; Haechang Lee ; Pamarti, Sudhakar ; Fiez, T.S. ; Makinwa, Kofi ; Partridge, Aaron ;
Author_Institution :
SiTime, Sunnyvale, CA, USA
Abstract :
Mobile time-keeping applications require small form-factor, tight frequency stability, and micro-power 32.768kHz clock references. Today´s 32kHz quartz resonators and oscillators are facing challenges in size reduction. Previously described MEMS-based oscillators can achieve tight accuracy but operate at high frequency with power unsuitable for mobile applications. This paper introduces a 32kHz MEMS-based oscillator. Based on a comparison table of recent oscillators shown in Fig. 12.9.6, it offers the smallest size, 1.55×0.85mm2, with the best frequency stability, 100ppm (XO) and 3ppm (TCXO) over the industrial temperature range of -40 to 85°C. Supply current is 0.9 and 1.0μA for XO and TCXO, respectively, at supply voltages from 1.5 to 3.6V.
Keywords :
micromechanical resonators; oscillators; MEMS based oscillator; current 0.9 muA to 1 muA; frequency 32.768 kHz; frequency stability; micropower clock reference; mobile time keeping applications; size 0.85 mm; size 1.55 mm; temperature -40 C to 85 C; voltage 1.5 V to 3.6 V; CMOS integrated circuits; Circuit stability; Micromechanical devices; Oscillators; Resonant frequency; Temperature measurement; Thermal stability;
Conference_Titel :
Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2014 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4799-0918-6
DOI :
10.1109/ISSCC.2014.6757411
