• DocumentCode
    2622831
  • Title

    Nonlinear control of a planar magnetic levitation system

  • Author

    Lévis, Michel ; Maggiore, Manfredi

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
  • Volume
    6
  • fYear
    2003
  • fDate
    9-12 Dec. 2003
  • Firstpage
    6578
  • Abstract
    This paper initiates a research aimed at developing tools that may have practical significance in contactless position control applications such as, e.g., photolithography. We describe a simple three-magnets planar positioning device, its mathematical model, and design a nonlinear controller that stabilizes it about an equilibrium. Specifically, we derive a feedback transformation mapping for the nonlinear system with three positive inputs into a linear system in Brunovsky normal form with two inputs. Robust and robust adaptive controllers are then designed in the transformed input domain and their effectiveness in handling uncertainties is compared through simulations. An experimental testbed under construction is described. It was used as a benchmark to test the controllers developed here as well as other nonlinear control approaches.
  • Keywords
    adaptive control; control system synthesis; electronics industry; feedback; magnetic levitation; nonlinear control systems; photolithography; position control; robust control; Brunovsky normal form; contactless position control; feedback transformation mapping; linear system; mathematical model; nonlinear control; photolithography process; planar magnetic levitation system; robust adaptive controllers; semiconductor industry; three-magnet planar positioning device; Control systems; Feedback; Lithography; Magnetic levitation; Mathematical model; Nonlinear control systems; Nonlinear systems; Position control; Robust control; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Decision and Control, 2003. Proceedings. 42nd IEEE Conference on
  • ISSN
    0191-2216
  • Print_ISBN
    0-7803-7924-1
  • Type

    conf

  • DOI
    10.1109/CDC.2003.1272430
  • Filename
    1272430