Title :
RF-MEMS SPDT switch on silicon substrate for space applications
Author :
Farinelli, Paola ; Giacomozzi, Flavio ; Mannocchi, Giovanni ; Marcelli, Romolo ; Margesin, Benno ; Mezzanotte, Paolo ; Di Nardo, Sergio ; Russer, Peter ; Sorrentino, Roberto ; Vitulli, Francesco ; Vietzorreck, Larissa
Author_Institution :
Dipt. di Ingegneria Elettronica e dell´´Informazione, Perugia, Italy
Abstract :
The paper illustrates the activity carried out under an ESA contract for the development of a miniaturized RF-MEMS SPDT switch and switch matrix using micromachining technology on a silicon substrate for power applications. A manufacturing procedure, based on an eight masks process, has been set up. At present, a broadband single-pole-double-throw (SPDT) switch operating in the 0-30 GHz frequency range has been fabricated and measured. Isolation of about -40 dB and insertion loss better than -0.7 dB have been obtained.
Keywords :
micromachining; microswitches; microwave switches; silicon; substrates; 0 to 30 GHz; RF-MEMS SPDT switch; Si; broadband single-pole-double-throw switch; design process; fabrication process; micromachining technology; miniaturized switch; silicon substrate; space applications; switch matrix; Contracts; Frequency; Isolation technology; Manufacturing processes; Micromachining; Paper technology; Radiofrequency microelectromechanical systems; Silicon; Space technology; Switches;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2004. Digest of Papers. 2004 Topical Meeting on
Print_ISBN :
0-7803-8703-1
DOI :
10.1109/SMIC.2004.1398190
