A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication

This paper presents a novel flexural-based nano-positioning actuator that has a positioning accuracy of 10 nm (limited by encoder resolution) throughout a range of 3 mm. A new dual-magnet configuration is introduced to enhance this electromagnetically driven actuator in achieving 60 N/Amp in a compact configuration. In addition, a constant and evenly distributed magnetic flux density is obtained throughout 11 mm of air gap. A new mathematical model is presented to accurately predict the behavior of magnetic field within the effective air gap of this configuration. Complete analytical models for this actuator´s electromagnetic drive and flexural-bearing support element are presented. Lastly, a prototype of this actuator is developed for validating the established analytical models and verifying the claimed capabilities.