Title :
Attenuation and dispersion modeling of coplanar waveguides on Si: free carriers contribution
Author :
Duraz, E. ; Duvillaret, L. ; Ferrari, P. ; Coutaz, J.-L. ; Ghesquiers, J.-P. ; Estebe, E.
Author_Institution :
LAHC, Univ. de Savoie, Le Bourget Du Lac, France
Abstract :
We present an approach based on a physical model allowing the calculation of the effective permittivity of a substrate and on an electromagnetic model giving the propagation constant of a coplanar waveguide. Both models are analytical and no adjustable parameter is required to fit the measurements.
Keywords :
MMIC; coplanar waveguides; dispersion (wave); permittivity; silicon; substrates; waveguide theory; MMIC; attenuation modeling; coplanar waveguides; dispersion modeling; effective permittivity; electromagnetic model; free carriers contribution; physical model; propagation constant; silicon; substrate; Attenuation; Conductivity; Coplanar waveguides; Dielectric constant; Dielectric substrates; Electromagnetic waveguides; Integrated circuit measurements; Permittivity measurement; Propagation constant; Silicon;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2004. Digest of Papers. 2004 Topical Meeting on
Print_ISBN :
0-7803-8703-1
DOI :
10.1109/SMIC.2004.1398217
