Title :
Development of characterization methods for micromachined embedded test structures
Author :
Davies-Venn, E. ; Pan, T. ; Baldi, A. ; Drayton, R.F. ; Ziaie, B.
Author_Institution :
Dept. of Electr. Eng. & Comput. Eng., Minnesota Univ., Minneapolis, MN, USA
Abstract :
Methods of characterizing low frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline designs are discuss and data is presented regarding the performance limitation of CPW based design architectures. A quality (Q) factor of an embedded inductor > 50 is successfully extracted for operation below 1 GHz based on a 15 turn configuration using S-parameter measurements. Finally inductor performance in terms of Q factor is presented based on on-wafer measurements.
Keywords :
Q-factor measurement; S-parameters; coils; embedded systems; inductors; integrated circuit design; micromachining; passive networks; silicon; Q factor; S-parameter measurements; characterization methods; durioid fixtures; embedded coils; feedline designs; inductor performance; low frequency embedded passives; micromachined embedded test structures; on-wafer measurements; quality factor; silicon substrates; Coils; Conductivity; Data mining; Fixtures; Frequency; Inductors; Q factor; Q measurement; Silicon; Testing;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2004. Digest of Papers. 2004 Topical Meeting on
Print_ISBN :
0-7803-8703-1
DOI :
10.1109/SMIC.2004.1398234
