Title :
Simulation of Electrostatically Suspended Micro-gyroscope Based on LabVIEW
Author :
Qin, Kui ; Zhang, Weiping ; Chen, Wenyuan ; Liu, Wu ; Cui, Feng ; Wu, Xiaosheng
Author_Institution :
Key Lab. for Thin Film & Microfabrication Technol. of Minist. of Educ., Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
A novel electrostatically suspended gyroscope based on MEMS technology is presented in this article, including its structure and basic principle of electrostatic suspension. Especially integrated control strategy and position feedback PID control method of the Z-axis suspension system are analyzed. From the simulation result based on Lab VIEW model we can see that the gyroscope rotor can be suspended stably in about 17ms, verifying the feasibility of the integrated control method. This can help us develop actual hardware system to control the gyroscope´s suspension in the next experiment.
Keywords :
gyroscopes; micromechanical devices; three-term control; virtual instrumentation; LabVIEW model; MEMS technology; PID control method; Z-axis suspension system; electrostatically suspended microgyroscope; gyroscope rotor; gyroscope suspension; hardware system; Electrodes; Electrostatics; Gyroscopes; Rotors; Substrates; Suspensions; Voltage control; Electrostatically Suspended Gyroscope; Integrated Control Strategy; LabVIEW Simulation;
Conference_Titel :
Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on
Conference_Location :
Shangshai
Print_ISBN :
978-1-4244-9010-3
DOI :
10.1109/ICMTMA.2011.633
