Title :
A 1mW Dual-Chopper Amplifier for a 50-/spl mu/g/spl radic/Hz Monolithic CMOS-MEMS Capacitive Accelerometer
Author :
Fang, Deyou ; Qu, Hongwei ; Xie, Huikai
Author_Institution :
Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL
Abstract :
This paper reports a novel dual-chopper amplifier (DCA) for CMOS-MEMS capacitive accelerometers. A DCA prototype integrated with a single-axis accelerometer has been fabricated using TSMC 0.35 mum CMOS process. The DCA achieves a 16nV/radicHz input-referred noise at 20 Hz with a power dissipation of only 1 mW. The measured accelerometer noise floor is 50 mug/radicHz down to 5 Hz
Keywords :
CMOS integrated circuits; accelerometers; amplifiers; integrated circuit design; low-power electronics; microsensors; monolithic integrated circuits; 0.35 micron; 1 mW; CMOS process; CMOS-MEMS capacitive accelerometer; DCA prototype; TSMC; accelerometer noise floor; dual-chopper amplifier; input-referred noise; low power electronics; monolithic capacitive accelerometer; single-axis accelerometer; 1f noise; Acceleration; Accelerometers; Amplitude modulation; Bridge circuits; Choppers; Circuit noise; Clocks; Consumer electronics; Micromechanical devices;
Conference_Titel :
VLSI Circuits, 2006. Digest of Technical Papers. 2006 Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
1-4244-0006-6
DOI :
10.1109/VLSIC.2006.1705311
