Measurement of on-chip transmission-line with stacked split-ring resonators

This paper reports measurement results of on-chip transmission-line with split-ring resonators. Split-ring resonator (SRR) has attracted attention as an implementation of metamaterial (left-handed material). However when simple SRR is implemented in LSIs, the resonance frequency becomes around 200GHz and it is too high to employ on on-chip circuits. We designed a stacked SRR to lower the resonant frequency in a 0.18μm CMOS. Measurement results show that the stacked SRRs can realize the resonance frequency below 50GHz. Also measurement results show a guideline of area effective implementation of on-chip SRR.