Title :
Yield optimization using advanced statistical correlation methods
Author :
Tikkanen, Jeff ; Siatkowski, Sebastian ; Sumikawa, Nik ; Wang, Li-C. ; Abadir, Magdy S.
Author_Institution :
Univ. of California, Santa Barbara, Santa Barbara, CA, USA
Abstract :
This work presents a novel yield optimization methodology based on establishing a strong correlation between a group of fails and an adjustable process parameter. The core of the methodology comprises three advanced statistical correlation methods. The first method performs multivariate correlation analysis to uncover linear correlation relationships between groups of fails and measurements of a process parameter. The second method partitions a dataset into multiple subsets and tries to maximize the average of the correlations each calculated based on one subset. The third method performs statistical independence test to evaluate the risk of adjusting a process parameter. The methodology was applied to an automotive product line to improve yield. Five process parameter changes were discovered which led to significant improvement of the yield and consequently significant reduction of the yield fluctuation.
Keywords :
correlation methods; integrated circuit yield; statistical analysis; adjustable process parameter; advanced statistical correlation methods; linear correlation relationships; multivariate correlation analysis; statistical independence test; yield fluctuation; yield optimization methodology; Correlation; Equations; Kernel; Loading; Mathematical model; Optimization; Vectors;
Conference_Titel :
Test Conference (ITC), 2014 IEEE International
Conference_Location :
Seattle, WA
DOI :
10.1109/TEST.2014.7035326