DocumentCode
262779
Title
Yield optimization using advanced statistical correlation methods
Author
Tikkanen, Jeff ; Siatkowski, Sebastian ; Sumikawa, Nik ; Wang, Li-C. ; Abadir, Magdy S.
Author_Institution
Univ. of California, Santa Barbara, Santa Barbara, CA, USA
fYear
2014
fDate
20-23 Oct. 2014
Firstpage
1
Lastpage
10
Abstract
This work presents a novel yield optimization methodology based on establishing a strong correlation between a group of fails and an adjustable process parameter. The core of the methodology comprises three advanced statistical correlation methods. The first method performs multivariate correlation analysis to uncover linear correlation relationships between groups of fails and measurements of a process parameter. The second method partitions a dataset into multiple subsets and tries to maximize the average of the correlations each calculated based on one subset. The third method performs statistical independence test to evaluate the risk of adjusting a process parameter. The methodology was applied to an automotive product line to improve yield. Five process parameter changes were discovered which led to significant improvement of the yield and consequently significant reduction of the yield fluctuation.
Keywords
correlation methods; integrated circuit yield; statistical analysis; adjustable process parameter; advanced statistical correlation methods; linear correlation relationships; multivariate correlation analysis; statistical independence test; yield fluctuation; yield optimization methodology; Correlation; Equations; Kernel; Loading; Mathematical model; Optimization; Vectors;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Conference (ITC), 2014 IEEE International
Conference_Location
Seattle, WA
Type
conf
DOI
10.1109/TEST.2014.7035326
Filename
7035326
Link To Document