Trenched gamma-ray detector

3-D detectors were first introduced by S. Parker et al. as radiation-hard detectors. We present 3-D detectors for use as thick gamma-ray detectors. Current room-temperature gamma-ray detectors are built in planar device architecture. We use micro-machining techniques to introduce vertical electrodes, which allow lateral charge collection, decoupling thickness and charge collection properties. The ultimate goal is the ability to form cm thick room-temperature gamma-ray detectors. The vertical electrodes are micro-machined trenches with depth up to 1.7 mm in silicon. We present the basic detector structure, SILVACO simulations, and first radiation measurements. An energy resolution of 2.3 keV FWHM at 59.5 keV was obtained. This is evidence of excellent charge collection from the trenches.