• DocumentCode
    2630750
  • Title

    Control of a hysteretic electromagnetic electron lens system

  • Author

    Vermulst, B.J.D. ; van Lierop, C.M.M. ; Duarte, J.L.

  • Author_Institution
    Electromech. & Power Electron. Group, Eindhoven Univ. of Technol., Eindhoven, Netherlands
  • fYear
    2012
  • fDate
    25-28 Oct. 2012
  • Firstpage
    2198
  • Lastpage
    2203
  • Abstract
    The design of electron lenses for high-precision applications is complicated by ferromagnetic properties such as limited transition time and hysteresis. To be able to achieve high focusing precision and fast transition times, these properties should be taken into account when designing suitable controllers. In this project, feedback control, feed-forward control and feedback/feed-forward control topologies have been evaluated and trajectory planning has been implemented to reduce overshooting. Feed-forward control in particular proved to be a low-cost solution while the achievable transition time reduction is significant using the proposed automated tuning procedure.
  • Keywords
    control system synthesis; electron microscopy; feedback; feedforward; lenses; optical control; optical focusing; trajectory control; tuning; control topology; controller designing; electron lens design; electron microscopy; fast transition time; feed-forward control; feedback control; ferromagnetic property; high focusing precision; high-precision application; hysteretic electromagnetic electron lens system control; limited transition time; overshooting reduction; trajectory planning; transition time reduction; tuning procedure; Magnetic analysis; Magnetic properties; Process control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IECON 2012 - 38th Annual Conference on IEEE Industrial Electronics Society
  • Conference_Location
    Montreal, QC
  • ISSN
    1553-572X
  • Print_ISBN
    978-1-4673-2419-9
  • Electronic_ISBN
    1553-572X
  • Type

    conf

  • DOI
    10.1109/IECON.2012.6388682
  • Filename
    6388682