DocumentCode
2630750
Title
Control of a hysteretic electromagnetic electron lens system
Author
Vermulst, B.J.D. ; van Lierop, C.M.M. ; Duarte, J.L.
Author_Institution
Electromech. & Power Electron. Group, Eindhoven Univ. of Technol., Eindhoven, Netherlands
fYear
2012
fDate
25-28 Oct. 2012
Firstpage
2198
Lastpage
2203
Abstract
The design of electron lenses for high-precision applications is complicated by ferromagnetic properties such as limited transition time and hysteresis. To be able to achieve high focusing precision and fast transition times, these properties should be taken into account when designing suitable controllers. In this project, feedback control, feed-forward control and feedback/feed-forward control topologies have been evaluated and trajectory planning has been implemented to reduce overshooting. Feed-forward control in particular proved to be a low-cost solution while the achievable transition time reduction is significant using the proposed automated tuning procedure.
Keywords
control system synthesis; electron microscopy; feedback; feedforward; lenses; optical control; optical focusing; trajectory control; tuning; control topology; controller designing; electron lens design; electron microscopy; fast transition time; feed-forward control; feedback control; ferromagnetic property; high focusing precision; high-precision application; hysteretic electromagnetic electron lens system control; limited transition time; overshooting reduction; trajectory planning; transition time reduction; tuning procedure; Magnetic analysis; Magnetic properties; Process control;
fLanguage
English
Publisher
ieee
Conference_Titel
IECON 2012 - 38th Annual Conference on IEEE Industrial Electronics Society
Conference_Location
Montreal, QC
ISSN
1553-572X
Print_ISBN
978-1-4673-2419-9
Electronic_ISBN
1553-572X
Type
conf
DOI
10.1109/IECON.2012.6388682
Filename
6388682
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