DocumentCode :
2630750
Title :
Control of a hysteretic electromagnetic electron lens system
Author :
Vermulst, B.J.D. ; van Lierop, C.M.M. ; Duarte, J.L.
Author_Institution :
Electromech. & Power Electron. Group, Eindhoven Univ. of Technol., Eindhoven, Netherlands
fYear :
2012
fDate :
25-28 Oct. 2012
Firstpage :
2198
Lastpage :
2203
Abstract :
The design of electron lenses for high-precision applications is complicated by ferromagnetic properties such as limited transition time and hysteresis. To be able to achieve high focusing precision and fast transition times, these properties should be taken into account when designing suitable controllers. In this project, feedback control, feed-forward control and feedback/feed-forward control topologies have been evaluated and trajectory planning has been implemented to reduce overshooting. Feed-forward control in particular proved to be a low-cost solution while the achievable transition time reduction is significant using the proposed automated tuning procedure.
Keywords :
control system synthesis; electron microscopy; feedback; feedforward; lenses; optical control; optical focusing; trajectory control; tuning; control topology; controller designing; electron lens design; electron microscopy; fast transition time; feed-forward control; feedback control; ferromagnetic property; high focusing precision; high-precision application; hysteretic electromagnetic electron lens system control; limited transition time; overshooting reduction; trajectory planning; transition time reduction; tuning procedure; Magnetic analysis; Magnetic properties; Process control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IECON 2012 - 38th Annual Conference on IEEE Industrial Electronics Society
Conference_Location :
Montreal, QC
ISSN :
1553-572X
Print_ISBN :
978-1-4673-2419-9
Electronic_ISBN :
1553-572X
Type :
conf
DOI :
10.1109/IECON.2012.6388682
Filename :
6388682
Link To Document :
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