Title :
Laser terahertz emission microscope and its application
Author :
Tonouchi, Masayoshi
Author_Institution :
Inst. of Laser Eng., Osaka Univ., Japan
Abstract :
Laser terahertz emission microscope (LTEM) is proposed and developed. Two-dimensional images of THz emission are successfully captured from various kinds of materials and devices. The results suggest that the LTEM system will be a useful tool for scientific imaging, and inspecting LSI chips.
Keywords :
measurement by laser beam; submillimetre wave imaging; LSI chip inspection; LTEM system; THz emission; Two-dimensional images; laser terahertz emission microscope; scientific imaging; Circuit faults; Laser excitation; Laser theory; Microscopy; Optical pulses; Optical pumping; Ultrafast electronics; Ultrafast optics; Visualization; Voltage;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1547969
