Title :
Widely tunable and highly selective monolithic Fabry-Perot filter for dense WDM systems
Author :
Strassner, M. ; Simozrag, B. ; Bouchoule, S. ; Sagnes, I.
Author_Institution :
Laboratoire de Photoniques et de Nanostructures, CNRS, Marcoussis, France
Abstract :
We report the design and fabrication of highly selective and widely tunable filters. The design of the micro-mechanical structure ensures a stable resonator geometry under actuation that provides constant performance in terms of selectivity (FWHM < 0.5 nm) throughout the entire tuning range of 130 nm. The devices are micro-machined from a monolithic, all epitaxial InP/InGaAs structure that can be integrated with an InP-based photo detector or emitter in a low-cost component for wavelength division multiplexing systems operating in the 1.3 or 1.55 μm band.
Keywords :
III-V semiconductors; gallium arsenide; indium compounds; micro-optics; micromachining; optical communication equipment; optical design techniques; optical fabrication; optical fibre communication; optical filters; optical tuning; photodetectors; wavelength division multiplexing; 1.3 mum; 1.55 mum; Fabry-Perot filter; InP; InP-InGaAs; InP/InGaAs structure; dense WDM; micromachining; micromechanical structure; photodetector; resonator; tunable filters; wavelength division multiplexing systems; Air gaps; Detectors; Electrostatic actuators; Fabrication; Fabry-Perot; Indium phosphide; Laser tuning; Resonator filters; Tunable circuits and devices; Wavelength division multiplexing;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1547983
