Interactive nano manipulator based on an atomic force microscope for scanning electron microscopy

Scanning Probe Microscopes (SPMs) are well known as measurement tools of nanometer scale resolution. SPMs can be used not only for surface observation but also for local surface manipulation. The typical manipulation techniques using SPM are directly transferring or scratching some samples on surfaces with the probe. However, it is difficult to control precise positioning of the probe edge at exact target on the sample and move it for manipulation because there are no monitoring systems of the probe in conventional SPM operation. Thus, real time monitoring systems have been desired during the SPM manipulations. In this paper, we describe a novel nano manipulator capable to be operated inside the sample chamber of a scanning electron microscope (SEM). The nano manipulator is based on an atomic force microscope (AFM). A self-sensitive cantilever is employed for the AFM operation. This system allows us to fabricate and observe micro- and nano-scale samples under SEM observation. Furthermore, the AFM have multi-functional tools such as several type cantilevers, micro needle, micro tweezers, and micro scissors, which can be switched each other for multi-purpose measurement and fabrication. This system would be very useful for nanometer-scale measurement and engineering.