• DocumentCode
    2633380
  • Title

    Electromigration degradation mechanism analysis of SnAgCu interconnects for eWLB package

  • Author

    Frank, T. ; Chappaz, C. ; Arnaud, L. ; Federspiel, X. ; Colella, F. ; Petitprez, E. ; Anghel, L.

  • Author_Institution
    STMicroelectron., Crolles, France
  • fYear
    2012
  • fDate
    15-19 April 2012
  • Abstract
    This paper focuses on electromigration of SnAgCu interconnects of Fanout embedded Wafer Level Ball Grid Array (FO-eWLB) technology. Black´s parameters are analyzed regarding stage of degradation through approaches based on resistance slope modeling and on Failure Criterion (FC).
  • Keywords
    ball grid arrays; electromigration; failure analysis; integrated circuit interconnections; wafer level packaging; Black parameter analysis; SnAgCu; SnAgCu interconnect; eWLB package; electromigration degradation mechanism analysis; failure criterion; fanout embedded wafer level ball grid array technology; resistance slope modeling; Current density; Degradation; Monitoring; Resistance; Temperature measurement; Temperature sensors; Tin; Electromigration; Intermetallic Compound (IMC); Redistribution Layer (RDL); SnAgCu; Solder ball;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium (IRPS), 2012 IEEE International
  • Conference_Location
    Anaheim, CA
  • ISSN
    1541-7026
  • Print_ISBN
    978-1-4577-1678-2
  • Electronic_ISBN
    1541-7026
  • Type

    conf

  • DOI
    10.1109/IRPS.2012.6241792
  • Filename
    6241792