Title :
High-speed undercut-wet-etching-active-region traveling-wave electroabsorption modulator
Author :
Tsu-Hsiu Wu ; Wen-Chin Cheng ; Lee, D.R.
Author_Institution :
Inst. of Electro-Optic Eng., Nat. Sun Yat-Sen Univ., Kaohsiung
Abstract :
In this work, a novel traveling-wave electroabsorption modulator (TWEAM) by double undercut-etching i-layers are proposed and successfully fabricated with high-efficiency and high-speed performance
Keywords :
electro-optical modulation; electroabsorption; etching; optical fabrication; TWEAM; traveling-wave electroabsorption modulator; undercut-wet-etching; Etching; Extinction ratio; Gold; High speed optical techniques; Indium phosphide; Optical fiber communication; Optical waveguides; PIN photodiodes; Parasitic capacitance; Propagation losses;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1548052
