Title :
Development of the Maskless Exposure Device equipped with a LCD-Projector for Fabrication of Micropatterned Surfaces and Microfluidic Channels
Author :
Itoga, Kazuyoshi ; Kobayashi, Jun ; Tsuda, Yukiko ; Yamato, Masayuki ; Kikuchi, Akihiko ; Okano, Teruo
Author_Institution :
Tokyo Women´´s Med. Univ., Tokyo
Abstract :
A newly developed device for photolithography of micropatterns without the preparation of photomasks by a modified, commercially available liquid crystal display projector (LCDP) was reported. The novel devise was equipped with an XY positioning stage, sliding system for variable focal distance, and exchangeable objective lens, facilitating the exposure of micropatterns with large area and variable resolution.
Keywords :
liquid crystal displays; microfluidics; photolithography; liquid crystal display projector; maskless exposure device; microfluidic channels fabrication; micropatterned surfaces fabrication; photolithography; Fabrication; Image generation; Image resolution; Lenses; Lithography; Microchannel; Microcomputers; Microfluidics; Prototypes; Resists;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2007. MHS '07. International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4244-1858-9
Electronic_ISBN :
978-1-4244-1858-9
DOI :
10.1109/MHS.2007.4420846
