Proton implanted single mode holey vertical-cavity surface-emitting lasers

Author

Leisher, Paul O. ; Danner, Aaron J. ; Raftery, James J., Jr. ; Choquette, Kent D.

Author_Institution

Dept. of Electr. & Comput. Eng., Illinois Univ. Urbana-Champaign, Champaign, IL, USA

fYear

2005

fDate

22-28 Oct. 2005

Firstpage

463

Lastpage

464

Abstract

This paper presents the design, fabrication, and characterization of wedge-shaped holes in proton-implant VCSELs. CW measurements indicate this holey structure can decrease threshold current, increase maximum single mode output power, and increase the efficiency of the VCSEL. With further refinement of the wedge-shape and implant diameter, to form a more optimum radially graded index profile, greater enhancement of the single mode VCSEL output is expected.

Keywords

distributed Bragg reflector lasers; gradient index optics; ion implantation; laser cavity resonators; laser modes; quantum well lasers; surface emitting lasers; DBR laser; continuous-wave measurements; graded index profile; holey VCSEL; laser characterization; laser design; laser fabrication; proton implanted lasers; quantum well laser; single mode lasers; vertical-cavity surface-emitting lasers; wedge-shaped holes; Current measurement; Implants; Laser modes; Optical device fabrication; Power generation; Power measurement; Protons; Surface emitting lasers; Threshold current; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE

Print_ISBN

0-7803-9217-5

Type

conf

DOI

10.1109/LEOS.2005.1548079

Filename

1548079