Control issues for MEMS

Author

Bryzek, Janusz ; Abbott, Eric ; Flannery, Anthony ; Cagle, David ; Maitan, Jacek

Author_Institution

BN Ventures, Fremont, CA, USA

Volume

3

fYear

2003

fDate

9-12 Dec. 2003

Firstpage

3039

Abstract

This paper discusses control issues for MEMS devices, starting with a brief overview of MEMS technology evolution, continuing with a characterization of increasing demand for control technology, and concluding with a case study outlining control issues in the high port count (1024×1024) photonic crossconnect. In this application, MEMS mirrors are controlled in a closed loop to deliver low-optical connection insertion loss and a high resistance to vibration, while optimizing response time. To close the control loop, extraction of reduced DOF 3D mirror models from finite element mechanical model is shown to be a very effective approach in predicting and optimizing dynamic performance of the nonlinear mirror drive. Another issue discussed is time-efficient calibration of the million optical connection points.

Keywords

closed loop systems; finite element analysis; micromechanical devices; mirrors; MEMS devices; MEMS mirrors; closed loop systems; control technology; finite element mechanical model; low-optical connection insertion loss; nonlinear mirror drive; Delay; Insertion loss; Microelectromechanical devices; Micromechanical devices; Mirrors; Optical control; Optical losses; Photonics; Predictive models; Vibration control;

fLanguage

English

Publisher

ieee

Conference_Titel

Decision and Control, 2003. Proceedings. 42nd IEEE Conference on

ISSN

0191-2216

Print_ISBN

0-7803-7924-1

Type

conf

DOI

10.1109/CDC.2003.1273090

Filename

1273090