Analysis and design of stators for linear noncontact type actuators based on NFAL

The suspension mechanism based on NFAL (near-field acoustic levitation) is fundamentally different from that in standing wave levitation. The proposed linear noncontact type actuator can levitate and carry the object along the direction of traveling wave in the planar plate, which produces the high intensity acoustic field. Moreover the object is suspended at the height only between tens and hundreds of microns. For the important component of linear noncontact type actuator, ultrasonic transducer, the theoretical analysis and optimization design were carried out. The prototypes were manufactured and the modal parameters were measured. Then the validation of the analysis and design for the novel actuator stator was obtained, which laid the foundation for the further study on the NFAL mechanism and the corresponding mathematical model representing the complete actuator.