Title :
Analysis of a piezoelectric micro-pump by using ANSYS
Author :
Xu, Jia-shan ; Guo, Tao ; Sun, Hong-ming ; Guo, Hang
Author_Institution :
Pen-Tung Sah MEMS Res. Center, Xiamen Univ., Xiamen
Abstract :
The micro-pump is an important drive component in the micro fluidics system. The piezoelectric drive is mainly employed as the actuator in MEMS devices. In this paper, a MEMS-based micro-pump with the attached PZT ceramic plate for drive is proposed. With the ANSYS software, a finite element model for this piezoelectrically driven micro-pump is established, and the vibration and coupled-field analyses are carried out in a cycle of vibration/driving to obtain the displacement of driving PZT/Si film and the liquid flow distribution inside the pumping cavity. The results show this proposed micro-pump has very good performance in driving fluid and can be used in micro fluid systems.
Keywords :
electric drives; finite element analysis; lead compounds; microfluidics; micropumps; piezoceramics; piezoelectric actuators; plates (structures); silicon; thin film devices; vibrations; ANSYS software; MEMS; PZT ceramic plate; actuator; coupled-field analyses; driving film; finite element model; liquid flow distribution; micro fluidics system; piezoelectric drive; piezoelectric micro-pump; vibration; Ceramics; Finite element methods; Fluid flow; Fluidics; Microelectromechanical devices; Micropumps; Piezoelectric actuators; Piezoelectric devices; Piezoelectric films; Semiconductor films; ANSYS; Micro-pump; finite element analysis; piezoelectric drive;
Conference_Titel :
Piezoelectricity, Acoustic Waves, and Device Applications, 2008. SPAWDA 2008. Symposium on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-2891-5
DOI :
10.1109/SPAWDA.2008.4775812
