Fabrication of 40 kHz receiving piezoelectric micro-machined ultrasonic transducers

Author

WANG, Meng-jiao ; HAO, Z. Hen-hong ; QIAO, Dong-hai

Author_Institution

Inst. of Acoust., Chinese Acad. of Sci., Beijing

fYear

2008

fDate

5-8 Dec. 2008

Firstpage

380

Lastpage

383

Abstract

This paper presents the fabrication of piezoelectric micro-machined ultrasonic transducers (PMUT) used in acoustic location field in the air. The transducer consists of piezoelectric ZnO thin film and the membrane made of Si₃N₄. The calculation of the vibration mode of PMUT has been made by the FEM method. Experiment results indicate the resonant frequency of the PMUT is 43.7 kHz. The initial results on receiving experiment using the PMUT as the receiver with the matching circuit are also presented.

Keywords

II-VI semiconductors; piezoelectric transducers; semiconductor thin films; ultrasonic transducers; zinc compounds; FEM method; ZnO; frequency 43.7 kHz; matching circuit; piezoelectric ZnO thin film; piezoelectric micro-machined ultrasonic transducers; vibration mode; Acoustic transducers; Biomembranes; Circuits; Fabrication; Piezoelectric films; Piezoelectric transducers; Resonant frequency; Semiconductor thin films; Ultrasonic transducers; Zinc oxide; Piezoelectric micro-machined ultrasonic transducers; ZnO film; matching circuit;

fLanguage

English

Publisher

ieee

Conference_Titel

Piezoelectricity, Acoustic Waves, and Device Applications, 2008. SPAWDA 2008. Symposium on

Conference_Location

Nanjing

Print_ISBN

978-1-4244-2891-5

Type

conf

DOI

10.1109/SPAWDA.2008.4775814

Filename

4775814