Title :
Investigation of the piezoelectric properties of semiconducting nanostructures
Author :
Peng, Bei ; Wu, Ling-hua ; Luo, Hao-wen ; Xu, Wen-hong ; Horacio, Espinosa
Author_Institution :
Center for Micro & Nano Electromech. Syst., Univ. of Electron. Sci. & Technol. of China, Chengdu
Abstract :
In this paper, the piezoelectric properties of semiconducting nano structures have been investigated. The piezoelectric effect can be characterized via a nano-scale material testing system that utilizing microelectromechanical systems technology. The coefficients were measured by applying a voltage (field) and measuring the induced elongation (strain). It can be readily seen that the piezoelectric effects in nanostructures are generally non-linear and the coefficient is much higher than that for bulk.
Keywords :
nanostructured materials; piezoelectricity; semiconductors; elongation; microelectromechanical systems; piezoelectric effect; semiconducting nanostructures; Gallium nitride; Materials testing; Mechanical engineering; Micromechanical devices; Piezoelectric effect; Piezoresistance; Semiconductivity; Semiconductor nanostructures; Strain measurement; Voltage; Semiconducting; microeletromechanical systems; nanostructures; piezo;
Conference_Titel :
Piezoelectricity, Acoustic Waves, and Device Applications, 2008. SPAWDA 2008. Symposium on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-2891-5
DOI :
10.1109/SPAWDA.2008.4775816
