Title :
Improvement of the low speed controllability of a V-shaped, two bolt-clamped Langevin-type transducer, ultrasonic linear motor
Author :
Asumi, K. ; Fujimura, T. ; Fukunaga, R. ; Kurosawa, M.K.
Author_Institution :
Taiheiyo-cement Corp., Sendai
Abstract :
A V-shaped, two bolt-clamped Langevin-type transducer, ultrasonic linear motor VSM was developed. In this study, the low speed controllability of the VSM was improved by the development of a new driving principle in which a feedback control was applied. The speed of the VSM was more than 1500mm/sec and the velocity error was approximately 0.2% when driven at 1000mm/sec. Ten nm step driving also could be obtained, and lnm resolution was observed. In the combination of a fast mode and a micro-motion mode, the stage was settled to a target position of plusmnlnm.
Keywords :
linear motors; ultrasonic motors; V shaped; bolt clamped Langevin type transducer; feedback control; low speed controllability; micro motion mode; ultrasonic linear motor; velocity error; Controllability; Electromagnetic interference; Frequency; Friction; Semiconductor device manufacture; Semiconductor device noise; Stability; Ultrasonic transducers; Vibrations; Voltage;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2007. MHS '07. International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4244-1858-9
Electronic_ISBN :
978-1-4244-1858-9
DOI :
10.1109/MHS.2007.4420884