Title :
Controlling uniformity of RRAM characteristics through the forming process
Author :
Kalantarian, A. ; Bersuker, G. ; Gilmer, D.C. ; Veksler, D. ; Butcher, B. ; Padovani, A. ; Pirrotta, O. ; Larcher, L. ; Geer, R. ; Nishi, Y. ; Kirsch, P.
Author_Institution :
SEMATECH, Austin, TX, USA
Abstract :
The proposed constant voltage forming (CVF) is shown to increase the resistances of the low resistance and high resistance states while reducing their variability. By forcing the forming in all devices to occur at the same predefined voltage, the CVF method eliminates a major cause of the device-to-device variation associated with the randomness of the forming voltage values. Moreover, both experiments and simulations show that CVF at lower voltages suppresses the parasitic overshoot current, resulting in a more controlled and smaller filament cross-section and lower operation currents.
Keywords :
forming processes; random-access storage; CVF process; RRAM characteristic; constant voltage forming process; device-to-device variation; filament cross-section; forming voltage value; operation current; parasitic overshoot current; uniformity control; voltage suppression; Current measurement; Hafnium compounds; Parasitic capacitance; Resistance; Switches; Temperature dependence; Transient analysis; HfO2; RRAM; constant voltage; forming; low power; overshoot; parasitic capacitance; uniformity;
Conference_Titel :
Reliability Physics Symposium (IRPS), 2012 IEEE International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4577-1678-2
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2012.6241874