• DocumentCode
    2634955
  • Title

    Controlling uniformity of RRAM characteristics through the forming process

  • Author

    Kalantarian, A. ; Bersuker, G. ; Gilmer, D.C. ; Veksler, D. ; Butcher, B. ; Padovani, A. ; Pirrotta, O. ; Larcher, L. ; Geer, R. ; Nishi, Y. ; Kirsch, P.

  • Author_Institution
    SEMATECH, Austin, TX, USA
  • fYear
    2012
  • fDate
    15-19 April 2012
  • Abstract
    The proposed constant voltage forming (CVF) is shown to increase the resistances of the low resistance and high resistance states while reducing their variability. By forcing the forming in all devices to occur at the same predefined voltage, the CVF method eliminates a major cause of the device-to-device variation associated with the randomness of the forming voltage values. Moreover, both experiments and simulations show that CVF at lower voltages suppresses the parasitic overshoot current, resulting in a more controlled and smaller filament cross-section and lower operation currents.
  • Keywords
    forming processes; random-access storage; CVF process; RRAM characteristic; constant voltage forming process; device-to-device variation; filament cross-section; forming voltage value; operation current; parasitic overshoot current; uniformity control; voltage suppression; Current measurement; Hafnium compounds; Parasitic capacitance; Resistance; Switches; Temperature dependence; Transient analysis; HfO2; RRAM; constant voltage; forming; low power; overshoot; parasitic capacitance; uniformity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium (IRPS), 2012 IEEE International
  • Conference_Location
    Anaheim, CA
  • ISSN
    1541-7026
  • Print_ISBN
    978-1-4577-1678-2
  • Electronic_ISBN
    1541-7026
  • Type

    conf

  • DOI
    10.1109/IRPS.2012.6241874
  • Filename
    6241874