DocumentCode
2634955
Title
Controlling uniformity of RRAM characteristics through the forming process
Author
Kalantarian, A. ; Bersuker, G. ; Gilmer, D.C. ; Veksler, D. ; Butcher, B. ; Padovani, A. ; Pirrotta, O. ; Larcher, L. ; Geer, R. ; Nishi, Y. ; Kirsch, P.
Author_Institution
SEMATECH, Austin, TX, USA
fYear
2012
fDate
15-19 April 2012
Abstract
The proposed constant voltage forming (CVF) is shown to increase the resistances of the low resistance and high resistance states while reducing their variability. By forcing the forming in all devices to occur at the same predefined voltage, the CVF method eliminates a major cause of the device-to-device variation associated with the randomness of the forming voltage values. Moreover, both experiments and simulations show that CVF at lower voltages suppresses the parasitic overshoot current, resulting in a more controlled and smaller filament cross-section and lower operation currents.
Keywords
forming processes; random-access storage; CVF process; RRAM characteristic; constant voltage forming process; device-to-device variation; filament cross-section; forming voltage value; operation current; parasitic overshoot current; uniformity control; voltage suppression; Current measurement; Hafnium compounds; Parasitic capacitance; Resistance; Switches; Temperature dependence; Transient analysis; HfO2 ; RRAM; constant voltage; forming; low power; overshoot; parasitic capacitance; uniformity;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium (IRPS), 2012 IEEE International
Conference_Location
Anaheim, CA
ISSN
1541-7026
Print_ISBN
978-1-4577-1678-2
Electronic_ISBN
1541-7026
Type
conf
DOI
10.1109/IRPS.2012.6241874
Filename
6241874
Link To Document