Title :
Enhanced infrared responsivity of helium implanted SOI waveguides
Author :
Liu, Y. ; Chow, C.W. ; Cheung, W.Y. ; Tsang, H.K.
Author_Institution :
Dept. of Electron. Eng., Chinese Univ. of Hong Kong, Shatin
Abstract :
We study the infrared photoresponse of silicon waveguides which were implanted with helium ions. The observed enhancement in responsivity at 1.55 mum wavelength was sufficient for use in in-line channel power monitoring applications
Keywords :
infrared detectors; ion implantation; optical waveguides; photodetectors; silicon-on-insulator; 1.55 mum; SOI waveguides; helium implantation; infrared responsivity; inline channel power monitoring; Helium; Monitoring; Optical coupling; Optical device fabrication; Optical waveguides; Particle beam optics; Photoconductivity; Photonic band gap; Programmable control; Silicon;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1548147
