A novel model order reduction approach for generating efficient nonlinear verilog-a models of mems gyroscopes

This paper reports a novel model-order reduction (MOR) approach for creating fast-running, nonlinear, multiphysics models in Verilog-A. This new approach differs from previous work by creating the reduced order model (ROM) directly from an accurate, nonlinear, multi-physics representation. The mechanical and electrical nonlinearities of the MEMS structure are persevered to capture effects such as quadrature, amplitude-dependent frequency shifting and electrostatic softening. The reduction algorithm has been implemented in the commercial MEMS/IC co-design tool MEMS+. The approach´s effectiveness is validated for a state-of-the-art, three-axis, capacitive gyroscope from Murata Electronics by comparing simulations of the created Verilog-A model with experimental data.