Title :
A high efficiency 3D planar microlens for monolithic optical interconnection system
Author :
Chang, Sung-Il ; Yoon, Jun-Bo
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., South Korea
Abstract :
A new 3D planar microlens for efficient monolithic optical interconnection system was developed. The fabricated 3D planar microlens showed excellent focusing characteristics and fiber-to-fiber coupling efficiency compared with a conventional 2D planar microlens.
Keywords :
microlenses; optical fabrication; optical fibre couplers; optical focusing; optical interconnections; 3D planar microlens; fiber-to-fiber coupling efficiency; focusing; monolithic optical interconnection; Lenses; Lithography; Microoptics; Monolithic integrated circuits; Optical coupling; Optical device fabrication; Optical fiber devices; Optical fibers; Optical interconnections; Resists;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1548216
