A realistic mechatronic system applied on the detection of optical information for CMOS-MEMS reflective micro grating

The study proposed a realistic mechatronic system to detect the optical information for CMOS-MEMS reflective micro grating. The different diffraction patterns with the various angles for the micro grating loaded on the stepping motor were exploited. Further the relationships between the diffraction patterns and resolving power with various elevation angles were investigated. For improving the image resolving power, the micro grating loaded on the shaft of stepping motor can be elevated to produce a different diffraction at the smallest stepping angle 3\´23". Through the comparison with theory and experimental results, NI LabVIEW and Vision Builder AI control an automation measurement system which is reliable and powerful for the micro grating optical information detection. A mechatronic system realistically demonstrated the high precision motion control performance for the micro device.