DocumentCode
2637734
Title
High performance TFT with MICC poly-Si on flexible metal foil
Author
Cheon, Jun Hyuk ; Kim, Sang Kyu ; Oh, Jae Hwan ; Jang, Jin
Author_Institution
Dept. of Inf. Display & Adv. Display Res. Center, Kyung Hee Univ., Seoul, South Korea
fYear
2005
fDate
22-28 Oct. 2005
Firstpage
934
Lastpage
935
Abstract
In this study, we investigated the bias-induced changes in the performance of the poly-Si thin-film transistors (TFTs) on flexible metal foil by metal-induced crystallization using a cap layer (MICC).
Keywords
crystallisation; elemental semiconductors; silicon; thin film transistors; MICC; Si; flexible metal foil; metal-induced crystallization; poly-Si TFT; Active matrix liquid crystal displays; Crystallization; Glass; Liquid crystal displays; Plastics; Steel; Stress; Substrates; Thin film transistors; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Print_ISBN
0-7803-9217-5
Type
conf
DOI
10.1109/LEOS.2005.1548310
Filename
1548310
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